NIST Unveils Atom-Based Standards for Measuring Chip Features

oeMagazine newscast, 25 Feb 2005 Device features on computer chips as small as 40 nm wide can now be measured reliably thanks to new test structures developed by a team of physicists, engineers, and statisticians at the U.S. National Institute of Standards and Technology (NIST), SEMATECH, and other collaborators. The test structures are replicated on reference materials that will allow better calibration of tools that monitor the manufacturing of microprocessors and similar integrated circuits. Read the article