Measurement in Micro

by Arnaud Liotard & Frederic Zamkotsian oeMagazine, June/July 2005 Micro-electromechanical systems technology is poised to play an important role in next-generation astronomy instrumentation as, for example, micro-deformable mirrors for adaptive optics and programmable slit masks for multi-object spectroscopy. The characterization of such devices is a key issue in assessing the performance of the actual components and in providing reliable inputs for our models, leading to a better design and optimization of the architectures. Optical techniques provide a means for inspecting such devices. Read the article